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US 2017/0363609 A1Published application
Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown
AssigneeUniversity of Ottawa
InventorsVincent TABARD-COSSA, Michel GODIN, Radin TAHVILDARI, Eric BEAMISH
Life of this patent
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Abstract
Nanopore arrays are fabricated by controlled breakdown in solid-state membranes integrated within polydimethyl-siloxane (PDMS) microfluidic devices. This technique enables the scalable production of independently addressable nanopores. By confining the electric field within the microfluidic architecture, nanopore fabrication is precisely localized and electrical noise is significantly reduced during sensing.
Claims33
An apparatus for fabricating one or more nanopores in a membrane, where the membrane defines opposing planar surfaces and is comprised of at least one dielectric layer, comprising:
- a first substrate having a common microchannel formed in an exposed surface of the first substrate;
- a support structure disposed onto the exposed surface of the first substrate and configured to host a membrane;
- a second substrate having one or more microfluidic channels formed in an inner surface of the second substrate, the second substrate being disposed onto the support structure with the inner surface facing the support structure such that the one or more microfluidic channels are fluidly separated by the membrane from the common microchannel;
- a set of electrodes including a reference electrode positioned on one side of the membrane and two or more additional electrodes positioned on an opposing side of the membrane, wherein the set of electrodes generate an electric potential across the membrane and the two or more additional electrodes are arranged in relation to the membrane such that the electric field across the membrane is uniform.
1 more element
An apparatus for fabricating one or more nanopores in a membrane, where the membrane defines opposing planar surfaces and is comprised of at least one dielectric layer, comprising:
- a first substrate having a common microchannel formed in an exposed surface of the first substrate;
- a support structure disposed onto the exposed surface of the first substrate and configured to host a membrane;
- an intermediate layer disposed onto the support structure and having at least one via formed therein;
- a second substrate having one or more microfluidic channels formed in an inner surface of the second substrate, the second substrate being disposed on the intermediate layer with the inner surface facing the support structure such that the one or more microfluidic channels are fluidly separated by the membrane from the common microchannel;
- a pair of electrodes arranged on opposing sides of the membrane, wherein the pair of electrodes generates an electric potential across the membrane and the at least one via in the intermediate layer fluidly couples the one or more microfluidic channels with an exposed surface of the membrane and is configured to create an electric field that is uniform in and around the via.
2 more elements
An apparatus for fabricating one or more nanopores in a membrane, where the membrane defines opposing planar surfaces and is comprised of at least one dielectric layer, comprising:
- a first substrate having a common microchannel formed in an exposed surface of the first substrate;
- a support structure disposed onto the exposed surface of the first substrate and configured to host a membrane;
- a second substrate having one or more microfluidic channels formed in an inner surface of the second substrate, the second substrate being disposed onto the support structure with the inner surface facing the support structure such that the one or more microfluidic channels are fluidly separated by the membrane from the common microchannel;
- a pair of electrodes arranged on opposing sides of the membrane, wherein the pair of electrodes generates an electric potential across the membrane and the one or more microfluidic channels are routed adjacent to the membrane in a manner that creates an electric field that is uniform across the area of the membrane.
1 more element
An apparatus for fabricating one or more nanopores in a membrane, comprising:
- a first substrate having a common microchannel formed in an exposed surface of the first substrate;
- a membrane disposed onto the exposed surface of the first substrate, where the membrane defines opposing planar surfaces and is comprised of at least one dielectric layer;
- a second substrate having one or more microfluidic channels formed in an inner surface of the second substrate, the second substrate being disposed onto the membrane with the inner surface facing the membrane such that the one or more microfluidic channels are fluidly separated by the membrane from the common microchannel;
- a set of electrodes including two reference electrodes positioned on one side of the membrane and two additional electrodes positioned on an opposing side of the membrane, wherein the set of electrodes generate an electric potential across the membrane and are arranged in relation to the membrane such that the electric field across the membrane is uniform.
1 more element
An apparatus for fabricating one or more nanopores in a membrane, comprising:
- a first substrate having a common microchannel formed in an exposed surface of the first substrate;
- a membrane disposed onto the exposed surface of the first substrate, where the membrane defines opposing planar surfaces and is comprised of at least one dielectric layer;
- an intermediate layer disposed onto the membrane and having at least one via formed therein;
- a second substrate having one or more microfluidic channels formed in an inner surface of the second substrate, the second substrate being disposed on the intermediate layer with the inner surface facing the support structure such that the one or more microfluidic channels are fluidly separated by the membrane from the common microchannel;
- a pair of electrodes arranged on opposing sides of the membrane, wherein the pair of electrodes generates an electric potential across the membrane and the at least one via in the intermediate layer fluidly couples the one or more microfluidic channels with an exposed surface of the membrane and is configured to create an electric field that is uniform in and around the via.
2 more elements
An apparatus for fabricating one or more nanopores in a membrane, where the membrane defines opposing planar surfaces and is comprised of at least one dielectric layer, comprising:
- a first substrate having a common microchannel formed in an exposed surface of the first substrate;
- a support structure disposed onto the exposed surface of the first substrate and configured to host a membrane;
- a second substrate having an array of microfluidic channels formed in an inner surface of the second substrate, the second substrate being disposed onto the support structure with the inner surface facing the support structure such that the array of microfluidic channels are fluidly separated by the membrane from the common microchannel, where each microfluidic channel in the array of microfluidic channels passes over a portion on the membrane and includes two control valves disposed therein, such that one control valve is upstream of the membrane and the other control valve is downstream of the membrane;
- and
- a pair of electrodes arranged on opposing sides of the membrane, wherein the pair of electrodes generates an electric potential across the membrane.
2 more elements
Dependencies are inferred from the claim text.