Saw magnetic sensor and manufacturing method for same
AssigneeAAC Technologies Pte. Ltd.
InventorsBei Tong, Yang Li, Zhuofan Zhou, Jun Ouyang, Benpeng Zhu
Life of this patent
Estimating the term…
Abstract
A SAW (Surface Acoustic Wave) magnetic sensor includes: a piezoelectric thin film; a seed layer; an interdigital transducer arranged respectively on each side of the piezoelectric thin film, the interdigital transducer comprising an interdigital electrode made from magnetic materials, and reflector grids located at both ends of the interdigital electrode; an underlying substrate arranged at the seed layer opposite to the piezoelectric thin film. A manufacturing method for the sensor is also disclosed.
Claims9
A SAW (Surface Acoustic Wave) magnetic sensor comprising:
- a piezoelectric thin film;
- a seed layer;
- an interdigital transducer arranged respectively on each side of the piezoelectric thin film, the interdigital transducer comprising an interdigital electrode made from magnetic materials, and reflector grids located at both ends of the interdigital electrode;
- an underlying substrate arranged at the seed layer opposite to the piezoelectric thin film.
The manufacturing method of the SAW magnetic sensor further comprising the step of:
- Step 5:
- Etching the surface of the underlying substrate far away from the seed layer, and forming the groove through etching process, wherein the groove is concave from the surface of the underlying substrate far away from the seed layer toward the surface close to the seed layer.
Dependencies are inferred from the claim text.