Methods and apparatus for semiconductor sample workflow
AssigneeFEI Company
InventorsKonstantin Balashov, Tom Miller
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Abstract
Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.
Claims21
A wafer or disk facsimile for use in storing and transporting test samples taken from a semiconductor wafer or data storage wafer, comprising:
- a body dimensioned to correspond to at least a diameter of the semiconductor wafer or data storage wafer from which the test samples are taken;
- and
- a plurality of niches formed in a surface of the body and configured to receive one or more of the test samples taken from the semiconductor wafer or data storage wafer.
A method of storing and transporting electron microscope (EM) lamella, comprising the steps of:
- (a) loading one or more lamella into a front opening unified pod (FOUP);
- (b) transporting the FOUP to an EM using an automated material handling system;
- (c) unloading the one or more lamella from the FOUP;
- and
- (d) loading the lamella into the EM.
The method of 14, wherein the wafer facsimile further comprises at least one sub-carrier positioned on or in a top surface of the wafer facsimile that is configured to carry a plurality of EM grids, such that the EM may load the sub-carrier directly into a vacuum chamber of the EM.
A wafer facsimile for use in storing and transporting test samples taken from a data storage wafer or a solar cell wafer, comprising:
- a body dimensioned to correspond to an outer diameter of the data storage wafer or solar cell wafer being tested;
- and
- a plurality of niches formed in a surface of the body and configured to receive one or more test samples.
The wafer facsimile of 20, wherein the plurality of niches is indexed such that each test sample received therein is identifiable to a semiconductor wafer or data storage wafer from which the test sample is taken.
Dependencies are inferred from the claim text.