Sensor for detecting electrically conductive and/or polarizable particles, sensor system, method for operating a sensor, method for producing a sensor of this type and use of a sensor of this type

A sensor for detecting soot particles, the soot particles being electrically conductive or polarizable, the sensor comprising:

• substrate,
• a first electrode layer and a second electrode layer, the second electrode layer arranged between the substrate and the first electrode layer;
• a first insulation layer disposed between the first electrode layer and the second electrode layer;
• a first opening disposed in the first electrode layer and a second opening disposed in the first insulation layer;
• wherein the first opening and the second opening are aligned to form a first passage to the second electrode layer.

A method of making a sensor for detecting soot particles, the soot particles being electrically conductive or polarizable, the sensor comprising

• a substrate;
• a first electrode layer and a second electrode layer, the second electrode layer arranged between the substrate and the first electrode layer;
• a first insulation layer disposed between the first electrode layer and the second electrode layer;
• a second insulation layer and a third electrode layer,
• a third opening disposed in the third electrode layer and a fourth opening disposed in the second insulation layer, and
• wherein the third opening and the fourth opening are aligned to form a passage extension to the first passage to the second electrode layer,
• the method comprising the steps of:
• laminating the first electrode layer, the second electrode layer, the third electrode, the first insulation layer, and the second insulation layer to form a laminate, the first insulation layer being disposed between the first electrode layer and the second electrode layer, the second insulation layer disposed between the first electrode layer and the third electrode layer,
• subsequently forming a passage through the first electrode layer, the third electrode layer, the first insulation layer, and the second insulation layer,
• ending the passage to have a bottom formed by a portion of the second electrode layer.

A method of making a sensor for detecting soot particles, the soot particles being electrically conductive or polarizable, the sensor comprising

• a substrate;
• a first electrode layer and a second electrode layer, the second electrode layer arranged between the substrate and the first electrode layer;
• a first insulation layer disposed between the first electrode layer and the second electrode layer;
• a second insulation layer and a third electrode layer,
• a third opening disposed in the third electrode layer and a fourth opening disposed in the second insulation layer, and
• wherein the third opening and the fourth opening are aligned to form a passage extension to the first passage to the second electrode layer, the method comprising the steps of:
• laminating the first electrode layer, the second electrode layer, the third electrode, the first insulation layer, and the second insulation layer to form a laminate, the first insulation layer being disposed between the first electrode layer and the second electrode layer, the second insulation layer disposed between the first electrode layer and the third electrode layer,
• wherein the first electrode layer, the second electrode layer, the third electrode, the first insulation layer, or the second insulation layer are structured by a lift-off process, an ink-jet process, a stamping process one over the other forming a passage to the second electrode layer.