Differential pressure transducer

A pressure transducer comprising:

• a housing with first port and a second port;
• a first chamber inside the housing;
• a second chamber inside the housing;
• and
• a diaphragm-beam structure comprising:
• a frame;
• a paddle configured to move from a first position to a second position;
• a resilient beam member;
• a diaphragm with a first surface and a second surface opposite the first surface of the diaphragm;
• and
• a gap defined between the paddle and the frame;
• wherein the diaphragm flexes under application of a pressure on the first surface of the diaphragm;
• wherein the resilient beam member anchors the paddle to the frame;
• the frame, the paddle, and the resilient beam member each include a respective first surface;
• the paddle includes a second surface opposite its first surface;
• the second surface of the diaphragm is mounted to the first surface of the paddle and flush mounted to at least a portion of the first surface of the frame such that the diaphragm bridges the gap between the paddle and the frame;
• the paddle moves from the first position to the second position due to said flexure of the diaphragm under application of a pressure on the second surface of the paddle;
• the resilient beam member bends due to said movement of the paddle thereby generating a strain within the resilient beam member;
• and
• a thickness of the diaphragm between its first surface and its second surface is less than 50 micrometers;
• wherein the first chamber is in fluid communication with the first port and the second chamber is in fluid communication with the second port;
• the sensor element is disposed inside the housing between the first chamber and the second chamber;
• and
• the diaphragm-beam structure generates a signal indicative of a differential pressure between a first fluid inside the first chamber and a second fluid inside the second chamber.