Micro electro-mechanical strain displacement sensor and usage monitoring system

A MEMS sensor for measuring mechanical strain in a structure, comprising:

• a base having a first end, a second end, the first end movable relative to the second end, the first end and the second end fixed to the structure;
• at least one array, each at least one array having at least one cantilever, each at least one cantilever having a movable, distal end and a fixed, proximal end, the fixed proximal end fixed to one of the first end of the base and the second end of the base, the at least one cantilever in electrical communication with an electrical circuit, and
• a contact fixed to the other of the first end of the base and the second end of the base, the contact in communication with the electric circuit,
• wherein when the first end of the base moves relative to the second end of the base the contact engages the distal end of the at least one cantilever thereby completing electrical connection between the engagement member and the at least one cantilever

An autonomous predictive system for measuring mechanical strain in a structure, comprising:

• a MEMS gauge adapted to provide an electronic signal in response to mechanical strain applied to the MEMS gauge;
• a processing means or a programmable logic device means or a combination thereof in electrical communication with the MEMS gauge, the processing means receiving the electronic signal and generating data output based on the electronic signal received from the MEMS gauge;
• an electronic database in electronic communication with the processor, the electronic database storing the data output received from the processor;
• and
• an electrical power source for providing electrical energy to at least one of:
• the processor, the MEMS gauge and the electronic database.

A method of manufacturing a MEMS displacement gauge or a strain gauge for measuring compressive and tensile strain in a structure, the gauge comprising:

• a base having a first end, a second end, the first end movable relative to the second end, the first end and the second end fixed to the structure;
• at least one array, each at least one array having at least one cantilever, each at least one cantilever having a movable, distal end and a fixed, proximal end, the fixed proximal end fixed to one of the first end of the base and the second end of the base, the at least one cantilever in electrical communication with an electrical circuit, and
• an engagement member fixed to the other of the first end of the base and the second end of the base, the engagement member in communication with the electric circuit,
• wherein when the first end of the base moves relative to the second end of the base the engagement member engages the distal end of the at least one cantilever thereby completed electrical connection between the engagement member and the at least one cantilever.

A method of measuring compressive and tensile strain in a structure with a MEMS gauge, the method comprising:

• receiving an electrical output from a MEMS gauge;
• detecting a wake-up signal when state of said MEMS gauge changes;
• processing the electrical output to result in strain data;
• storing the strain data in an electronic database.

A MEMS sensor for measuring mechanical strain in a structure comprising:

• a base having a first longitudinally extending side, a second longitudinally extending side, a first end mounted to the support structure and a second end mounted to the support structure, said second end longitudinally translatable relative to said first end;
• a first inwardly projecting slot located in said first longitudinally extending side, a second inwardly projecting slot located in said second longitudinally extending side, said first inwardly projecting slot located across and adjacent from said second inwardly projecting slot, said first inwardly projecting slot and said second inwardly projecting slot located adjacent to one of said first end and said second end;
• an internal lateral slot laterally extending across said body from a first position inwardly adjacent said first longitudinally extending side to a second position inwardly adjacent said second longitudinally extending side, said internal lateral slot located adjacent to said other of said first end and said second end;
• a first internal longitudinally extending slot extending between said first inwardly projecting slot and said internal lateral slot, said first internal longitudinally extending slot oriented parallel to and adjacent from said first longitudinally extending side, said first internal longitudinally extending slot having a first inwardly projecting component and a second inwardly projecting component each communicating with a longitudinally extending component;
• a second internal longitudinally extending slot extending between said second inwardly projecting slot and said internal lateral slot, said second internal longitudinally extending slot oriented parallel to said first internal longitudinally extending slot and oriented parallel to and adjacent from said second longitudinally extending side, said second internal longitudinally extending slot having a first inwardly projecting component and a second inwardly projecting component each communicating with a longitudinally extending component;
• an upwardly projecting central pin mounted to an upper surface of said base;
• a substrate fixed to an upper surface of said base, said substrate having a central hole adapted to loosely receive said upwardly projecting central pin, said substrate comprising:
• a central flexure component fixed to said substrate, said central flexure component having a central hole aligned with said central hole of said substrate and adapted to snugly receive said upwardly projecting central pin, said central flexure component having a first outer surface adjacent said central hole and a second outer surface adjacent said central hole;
• an array comprising:
• a first plurality of deformable electro conductive micro members, each of said first plurality of deformable electro conductive micro members transversely extending and oriented generally perpendicular to a longitudinal axis of said body and arranged in a longitudinally spaced out manner;
• each of said first plurality of deformable electro conductive micro members having a fixed first end fixed to said substrate and a movable second end, said movable second end translatable in a generally longitudinal direction;
• a second plurality of deformable electro conductive micro members, each of said second plurality of deformable electro conductive micro members transversely extending and oriented generally perpendicular to a longitudinal axis of said body and arranged in a longitudinally spaced out manner;
• each of said second plurality of deformable electro conductive micro members having a fixed first end and a movable second end, said movable second end translatable in a generally longitudinal direction;
• and
• wherein when said body is placed under tension said pin moves relative to said substrate in a direction away from said internal lateral slot and engages said central flexure component such that a first outer surface of said central flexure component engages said movable second end of an adjacent deformable electro conductive micro plate of one of said first plurality of deformable electro conductive micro members and said second plurality of deformable electro conductive micro members;
• and
• wherein when said body is placed under compression said pin moves relative to said substrate in a direction towards said internal lateral slot and engages said central flexure component such that a second outer surface of said central flexure component engages said movable second end of an adjacent deformable electro conductive micro plate of the other of said first plurality of deformable electro conductive micro members and said second plurality of deformable electro conductive micro members.