Integrated spectral unit
AssigneeSi-Ware Systems
InventorsYasser M. Sabry, Diaa Abdel Maged Khalil, Mostafa Medhat, Hisham Haddara, Bassam Saadany, Khaled Hassan
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Abstract
Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
Claims36
An integrated spectral unit, comprising:
- a first substrate;
- a second substrate coupled to the first substrate;
- a micro-electro-mechanical systems (MEMS) interferometer fabricated within the first substrate, the MEMS interferometer optically coupled to receive an input light beam and to direct the input light beam along an optical path to produce an output light beam resulting from interference experienced by the input light beam along the optical path;
- and
- a light redirecting structure integrated on the second substrate, the light redirecting structure comprising a first mirror configured to receive the input light beam propagating in an out-of-plane direction with respect to the first substrate and to redirect the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
Dependencies are inferred from the claim text.