Spectrometer, and spectrometer production method
AssigneeHamamatsu Photonics K.K.
InventorsTakafumi YOKINO, Katsumi SHIBAYAMA
Life of this patent
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Abstract
A spectrometer includes a light detection element provided with a light passing part and a light detection part, a support fixed to the light detection element such that a space is formed between the light passing part and the light detection part, a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space, a second reflection part provided in the light detection element and configured to reflect the light reflected by the first reflection part in the space, and a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the light detection part in the space.
Claims14
1-10. (canceled)
A spectrometer comprising:
- a light passing part;
- a light detection element provided with a light detection part;
- a support fixed to the light detection element such that a space is formed between the light passing part and the light detection part;
- a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space;
- a second reflection part configured to reflect the light reflected by the first reflection part in the space;
- and
- a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the light detection part in the space.
Dependencies are inferred from the claim text.