Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrument

A measuring instrument for measuring an electrostatic capacity, the instrument comprising:

• a base substrate having a disk shape;
• a plurality of first sensors arranged along an edge of the base substrate and respectively providing a plurality of side electrodes;
• one or more second sensors each of which has a bottom electrode provided along a bottom surface of the base substrate;
• and
• a circuit board mounted on the base substrate and connected to each of the plurality of first sensors and the one or more second sensors, the circuit board being configured to apply a high frequency signal to the plurality of side electrodes and the bottom electrode, to generate a plurality of first measurement values respectively indicating electrostatic capacities based on voltage amplitudes in the plurality of side electrodes, and to generate a second measurement value indicating an electrostatic capacity based on a voltage amplitude in the bottom electrode.