Industrial machine
AssigneeMitutoyo Corporation
InventorSeiichi OTSUBO
Life of this patent
Estimating the term…
Abstract
A coordinate measurement machine includes a column that can move relative to a placement surface on which a workpiece is placed, a guide part that is provided on the placement surface, the guide part guiding the column, a scale of a linear encoder that is supported on a side surface of the guide part, and detectors that are provided on the column, the detectors detecting a relative displacement with respect to the scale. The detectors detect a displacement of the column in each of a moving direction and a vertical direction. A coordinate measurement machine further includes a deformation amount acquisition part that acquires an amount of deformation of the guide part relative to the scale on the basis of detection results of the detectors.
Claims10
An industrial machine comprising:
- a movable body that can move relative to a placement surface on which a workpiece is placed;
- a guide part that is provided on the placement surface, the guide part guiding the movable body;
- a scale of a linear encoder that is supported on a side surface of the guide part;
- detectors that are provided on the movable body, the detectors detecting a relative displacement with respect to the scale and a displacement of the movable body in each of a moving direction and a vertical direction;
- and
- a deformation amount acquisition part that acquires an amount of deformation of the guide part relative to the scale on the basis of detection results of the detectors.
Dependencies are inferred from the claim text.