Apparatus For Rapid Cooling Of Substrates Utilizing A Flat Plate And Cooling Channels

A pressure vacuum furnace comprising:

• a furnace chamber;
• a cooling tube at least partially disposed within said furnace chamber and configured to selectively circulate liquid coolant media therethrough;
• and,
• a target plate assembly positioned over and around said cooling tube;
• said target plate assembly having a plurality of passages through which said cooling tube passes;
• wherein said plurality of passage are configured to allow longitudinal expansion and contraction of said cooling tube.

A cooling assembly for a pressure vacuum furnace comprising:

• a cooling channel at least partially disposed within said furnace chamber;
• a target plate member positioned over said cooling channel;
• and,
• a plurality of clamp members positioned beneath said cooling channel and being fixed to a bottom surface of said target plate.