Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature cvd systems

A gas distribution assembly comprising:

• an injection block having at least one inlet to deliver a precursor gas to a plurality of plenums from at least two gas sources;
• a perforated plate bounding at least one side of each of the plurality of plenums;
• at least one radiant energy source positioned within each of the plurality of plenums to provide energy to the precursor gas from one or both of the at least two gas sources and flow an energized gas though openings in the perforated plate and into a chamber;
• and
• a coolant source in communication with the at least one radiant energy source, wherein the radiant energy sources are independently controlled in each of the plurality of plenums.

A gas distribution assembly comprising:

• an injection block having at least one inlet to deliver a precursor gas to a plurality of plenums from at least two gas sources;
• a perforated plate bounding at least one side of each of the plurality of plenums;
• at least one radiant energy source positioned within each of the plurality of plenums to provide energy to the precursor gas from one or both of the at least two gas sources and flow an energized gas though openings in the perforated plate and into a chamber;
• and
• a variable power source coupled to each of the radiant energy sources positioned within each of the plurality of plenums.