Composition for film formation, and pattern-forming method
AssigneeJsr Corporation
InventorsShunsuke Kurita, Hisashi Nakagawa, Tatsuya Sakai
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Abstract
A composition for film formation includes a hydrolysis compound and a solvent composition. The hydrolysus compound is a hydrolysis product of a metal compound including a hydrolyzable group, a hydrolytic condensation product of the metal compound, a condensation product of the metal compound and a compound represented by formula (1), or a combination thereof. The metal compound includes a metal element from group 3, 4, 5, 6, 7, 8, 9, 10, 11, 12 or 13, or a combination thereof. The solvent composition includes an alcohol organic solvent, and a non-alcohol organic solvent that does not include an alcoholic hydroxyl group and that include a group including a hetero atom. R1X1)n (1)
Claims13
A composition for film formation comprising:
- a hydrolysis compound which is
- a hydrolysis product of a metal compound comprising a hydrolyzable group,
- a hydrolytic condensation product of the metal compound,
- a condensation product of the metal compound and a compound represented by formula (1), or
- a combination thereof;
- and
- a solvent composition,
- R1X1)n (1)
- wherein in the formula (1),
- R1 represents an organic group having a valency of n;
- X1 represents —OH, —COOH, —NCO or —NHRa;
- Ra represents a hydrogen atom or a monovalent organic group;
- n is an integer of 2 to 4;
- and
- a plurality of X1s are identical or different, and
- wherein,
- the metal compound comprises at least one metal element selected from the group consisting of Cr, Mo, W, Zn, Cd, Hg, B, Al, Ga, and In,
- the solvent composition comprises an alcohol organic solvent, and a non-alcohol organic solvent that does not comprise an alcoholic hydroxyl group and that comprises a group comprising a hetero atom,
- a content of the alcohol organic solvent with respect to a mass of the solvent composition is no less than 1% by mass and no greater than 50% by mass, and
- a content of the non-alcohol organic solvent with respect to the mass of the solvent composition is no less than 50% by mass and no greater than 99% by mass.
Dependencies are inferred from the claim text.