Inkjet apparatus and manufacturing method of inkjet apparatus
AssigneeRohm Co., Ltd.
InventorsKinya ASHIKAGA, Kunio IIDA
Life of this patent
Estimating the term…
Abstract
An inkjet apparatus capable of achieving a good withstand voltage in a movable part of a piezoelectric element is provided. An inkjet apparatus is provided, wherein the inkjet apparatus comprises: an actuator substrate, partitioning a cavity for accumulating ink; a vibrating film, supported by the actuator substrate and partitioning the cavity; and a piezoelectric element, on the vibrating film, and comprising an upper electrode, a lower electrode, and a piezoelectric film between the upper electrode and the lower electrode; wherein the piezoelectric film extends along a space covering the whole cavity; and the upper electrode is constrained in an inner space of the cavity.
Claims12
An inkjet apparatus, comprising:
- an actuator substrate, defining a cavity for accumulating ink;
- a vibrating film, supported by the actuator substrate and defining a side wall of the cavity;
- and
- a piezoelectric element on the vibrating film, and including a piezoelectric film for displacing the vibrating film to change a volume of the cavity,
- wherein the vibrating film has a compressive stress, and the piezoelectric film has a tensile stress.
A manufacturing method of an inkjet apparatus, comprising:
- forming, on an upper side of an actuator substrate, a vibrating film having a compressive stress;
- forming, on the vibrating film, a piezoelectric element including a piezoelectric film having a tensile stress;
- and
- etching the actuator substrate from a lower side, opposite the upper side, in a region opposite to the vibrating film to form a cavity.
Dependencies are inferred from the claim text.