System for producing high-purity granular silicon

A system for production of high purity silicon granules, the system comprising:

• a solid feeding port through which silicon seed particles are introduced;
• a collection chamber in flow communication with the solid feeding port;
• a preheating section disposed downstream of the collection chamber, the preheating section being configured to heat the silicon seed particles to a temperature between 100° C. and 1400° C. effective for rendering surfaces of the seed particles amenable to chemical vapor deposition;
• a reactor chamber downstream of the preheating section, the reactor chamber having a raw material gas inlet, an auxiliary gas inlet, and a pair of oppositely disposed distributors including a first distributor in fluid communication with a flow of raw material gas and a second distributor in fluid communication with an outlet for an exhaust gas;
• wherein a space between the first distributor and the second distributor is densely packed with silicon seed particles, and the raw material gas decomposes and deposits silicon on the silicon seed particles on the first distributor to form silicon granules having a size larger than the silicon seed particles.