Method and system for positioning using near field transducers, particularly suited for positioning electronic chips

A method for positioning and orienting objects relative to one another, comprising:

• a) providing a first object, a second object, and a third object;
• b) the first object being one of an electronic chip and a wafer;
• the second object being one of an electronic chip and a wafer;
• the third object being an electronic chip;
• and the first and third objects are to be stacked on top of the second object;
• c) positioning a near field transducer having an aperture and a sensor on the first object;
• d) directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture;
• e) positioning a sensor with electrical connections that includes a switch to a measuring system on the second object for detecting the effervescent wave from the near field transducer on the first object;
• f) providing an algorithm, using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position the first object in a desired position and orientation relative to the second object;
• g) after the first object is in the desired position and orientation relative to the second object, opening the switch in the electrical connections between the sensor on the second object and the measuring system;
• h) after the first object is in the desired position and orientation relative to the second object, making a set of electrical connections between the following:
• the first and second objects, the measuring system, and the sensor on the first object;
• i) positioning one of a near field transducer having an aperture and a sensor on the third object;
• and
• j) picking up the third object that includes the one of a near field transducer and sensor, and repeating the process to position the third object in the correct position and orientation relative to the first object by repeating the respective steps of directing a laser light toward the aperture of the near field transducer on the third object and using information obtained from the sensor on the first object, and then opening a switch in the respective electrical connections and then making a set of respective electrical connections.

A method for positioning and orienting a first object relative to a second object, the method comprising:

• a) positioning a near field transducer having an aperture on the first object;
• b) directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture;
• c) positioning a sensor on the second object for detecting the effervescent wave from the near field transducer;
• and
• d) providing an algorithm, using a signal amplitude and using the known position and orientation of the near field transducer and the sensor on the first and second objects in the algorithm to determine a desired position and orientation, and using the algorithm to control a nanopositioning system to position the first object in the desired orientation and location relative to the second object.