Internal temperature measuring apparatus and temperature difference measuring module
AssigneeOMRON Corporation
InventorShinya NAKAGAWA
Life of this patent
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Abstract
An internal temperature measuring apparatus includes a base and a MEMS device disposed on the base. The MEMS device includes a top face and a support. The top face includes a first thermopile configured to measure a first temperature difference used to calculate an internal temperature and a second thermopile configured to measure a second temperature difference used to calculate the internal temperature together with the first temperature difference. An orientation in which a cold junction of each thermocouple constituting the first thermopile is viewed from a hot junction coincides with an orientation in which a cold junction of each thermocouple constituting the second thermopile is viewed from a hot junction.
Claims4
An internal temperature measuring apparatus that measures an internal temperature of a measurement object, the internal temperature measuring apparatus comprising:
- a base in which one of surfaces of the base is brought into contact with a surface of the measurement object during calculation of the internal temperature of the measurement object;
- and
- a MEMS device disposed on the other surface of the base to a first temperature difference and a second temperature difference, the first temperature difference and the second temperature difference being used to calculate the internal temperature of the measurement object, the MEMS device comprising a top face and a support, the top face comprising a first thermopile configured to measure the first temperature difference and a second thermopile configured to measure the second temperature difference, the support supporting the top face, at least one cavity leading to the top face being provided in the support, an orientation in which a cold junction of each thermocouple constituting the first thermopile is viewed from a hot junction coincides with an orientation in which a cold junction of each thermocouple constituting the second thermopile is viewed from a hot junction.
A temperature difference measuring module that measures a first temperature difference and a second temperature difference, the first temperature difference and the second temperature difference being used to calculate an internal temperature of a measurement object, the temperature difference measuring module comprising:
- a package having a bottomed tubular shape comprising a plurality of leads;
- and
- a MEMS device disposed on an inner bottom surface of the package, the MEMS device comprising a top face and a support, the top face comprising a first thermopile configured to measure the first temperature difference and a second thermopile configured to measure the second temperature difference, the support supporting the top face, a plurality of cavities leading to the top face being provided in the support, an orientation in which a cold junction of each thermocouple constituting the first thermopile is viewed from a hot junction coincides with an orientation in which a cold junction of each thermocouple constituting the second thermopile is viewed from a hot junction.
Dependencies are inferred from the claim text.