Micromechanical piezoelectric actuators for implementing large forces and deflections
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsFabian STOPPEL, Bernhard WAGNER
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Abstract
A MEMS includes a diaphragm, a stroke structure coupled to the diaphragm, and at least two piezoelectric actuators coupled to a plurality of mutually spaced-apart contact points of the stroke structure via a plurality of mutually spaced-apart connecting elements, the at least two piezoelectric actuators being configured to cause a stroke movement of the stroke structure so as to deflect the diaphragm.
Claims15
A MEMS comprising:
- a diaphragm;
- a stroke structure coupled to the diaphragm;
- and
- at least two piezoelectric actuators coupled to a plurality of mutually spaced-apart contact points of the stroke structure via a plurality of mutually spaced-apart connecting elements;
- the at least two piezoelectric actuators being configured to cause a stroke movement of the stroke structure so as to deflect the diaphragm;
- and
- wherein each of the at least two piezoelectric actuators is connected to at least two mutually spaced-apart contact points of the stroke structure via at least two mutually spaced-apart connecting elements.
A MEMS loudspeaker for generating sound waves within the audible wavelength spectrum, comprising
- a diaphragm,
- a stroke structure coupled to the diaphragm, and
- at least two piezoelectric actuators,
- by means of which a stroke movement of the stroke structure can be caused for deflecting the diaphragm,
- wherein
- the piezoelectric actuators are connected to a plurality of mutually spaced-apart contact points of the stroke structure via a plurality of mutually spaced-apart flexible connecting elements, and that each of the at least two piezoelectric actuators is connected to at least two mutually spaced-apart contact points of the stroke structure via at least two mutually spaced-apart connecting elements.
A MEMS loudspeaker for generating sound waves within the audible wavelength spectrum, comprising
- a diaphragm,
- a stroke structure coupled to the diaphragm, and
- at least one piezoelectric actuator by means of which a stroke movement of the stroke structure can be caused for deflecting the diaphragm,
- wherein
- the MEMS loudspeaker comprises at least one position sensor configured to provide a sensor signal dependent on the deflection of the diaphragm, and that each of the at least two piezoelectric actuators is connected to at least two mutually spaced-apart contact points of the stroke structure via at least two mutually spaced-apart connecting elements.
Dependencies are inferred from the claim text.