Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device

An array of microelectromechanical devices comprising:

• a substrate;
• a plurality of microelectromechanical devices arranged on the substrate, wherein each of the plurality of microelectromechanical devices comprise:
• a diaphragm mechanically coupled to the substrate, the diaphragm comprising a stressed region to buckle the diaphragm into one of two geometrically stable positions;
• an actuator mechanically coupled to the diaphragm, the actuator comprising a piezoelectric layer over the diaphragm;
• a controller configured to provide an electrical control signal in response to a digital sound input;
• wherein the actuator is configured to receive the electrical control signal to exert a mechanical piezoelectric force on the diaphragm via the piezoelectric layer to move the diaphragm to create a sound wave;
• and
• an array controller coupled to the plurality of microelectromechanical devices configured to control the respective microelectromechanical devices with electrical control signals in accordance with the digital sound input to create an aggregate sound wave.

A method of manufacturing a microelectromechanical device comprising:

• providing a substrate;
• forming a diaphragm over the substrate, the diaphragm comprising a stressed region to buckle the diaphragm into one of two geometrically stable positions;
• forming an actuator over the diaphragm, the actuator comprising a piezoelectric layer over the diaphragm;
• and
• coupling a controller to the actuator configured to provide an electrical control signal in response to a digital sound input;
• wherein the actuator is configured to receive the electrical control signal to exert a mechanical piezoelectric force on the diaphragm via the piezoelectric layer to move the diaphragm to create a sound wave.

A method of operating a microelectromechanical device comprising:

• a substrate;
• a diaphragm mechanically coupled to the substrate, the diaphragm comprising a stressed region to buckle the diaphragm into one of two geometrically stable positions;
• an actuator mechanically coupled to the diaphragm, the actuator comprising a piezoelectric layer over the diaphragm;
• and a controller coupled to the actuator, the method comprising:
• receiving a digital sound input at the controller;
• and
• providing an electrical control signal to the actuator from the controller to exert a mechanical piezoelectric force on the diaphragm via the piezoelectric layer to move the diaphragm to create a sound wave.