Memory structure and manufacturing method for the same
AssigneeMacronix International Co., Ltd.
InventorsChih-Wei Hu, Teng-Hao Yeh
Life of this patent
Estimating the term…
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AssigneeMacronix International Co., Ltd.
InventorsChih-Wei Hu, Teng-Hao Yeh
Estimating the term…
A memory structure and a manufacturing method for the same are disclosed. The memory structure comprises memory segments. Each of the memory segments comprises a memory array region, a memory selecting region adjacent to the memory array region, a semiconductor gate electrode, a semiconductor channel connecting to the semiconductor gate electrode, a gate dielectric layer, a gate electrode layer, and channel layer. The gate electrode layer and the semiconductor channel are in the memory selecting region. The gate electrode layer and the semiconductor channel are separated from each other by the gate dielectric layer. The channel layer and the semiconductor gate electrode are in the memory array region. The channel layer and the semiconductor gate electrode are separated from each other by the gate dielectric layer.
A memory structure, comprising memory segments, each comprising:
A method for manufacturing a memory structure, comprising:
Dependencies are inferred from the claim text.