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US 2017/0323772 A1Published application
Protective metal oxy-fluoride coatings
AssigneeApplied Materials, Inc.
InventorsDavid Fenwick, Chengtsin Lee, Jennifer Y. Sun, Yikai Chen
Life of this patent
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Abstract
An article comprises a body having a protective coating. The protective coating is a thin film that comprises a metal oxy-fluoride. The metal oxy-fluoride has an empirical formula of MxOyFz, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x. The protective coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.
Claims20
A thin film comprising:
- a metal oxy-fluoride having an empirical formula of MxOyFz, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x;
- wherein the thin film has a thickness of 1 to 30 microns and a porosity of less than 0.1%.
A method comprising:
- providing a metal oxy-fluoride source material having an empirical formula of MxOy_sourceFz_source, wherein y_source has a value of 0.1 to 1.9 times a value of x and z_source has a value of 0.1 to 3.9 times the value of x;
- and
- performing one of sputter deposition or evaporation deposition of the metal oxy-fluoride source material to form a metal oxy-fluoride coating on an article, the metal oxy-fluoride coating having an empirical formula of MxOy_coatingFz_coating, wherein y_coating has a value of 0.1 to 1.9 times the value of x and z_coating has a value of 0.1 to 3.9 times the value of x, and wherein the metal oxy-fluoride coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.
A method comprising:
- providing a source material comprising a metal;
- and
- performing one of sputter deposition or evaporation deposition of the source material to form a metal oxy-fluoride coating on an article, comprising:
- introducing at least one of oxygen ions or radicals or fluorine ions or radicals to the sputtered or evaporated source material during the sputter deposition or the evaporation deposition, wherein the metal oxy-fluoride coating formed on the article has an empirical formula MxOy_coatingFz_coating, wherein y_coating has a value of 0.1 to 1.9 times a value of x and z_coating has a value of 0.1 to 3.9 times the value of x;
- wherein the coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.
2 more elements
Dependencies are inferred from the claim text.