Ion beam device

A freezer that is used in an ion beam device, which includes an emitter tip to generate an ion in an ion source chamber defined by an ion source housing and supplied with an ionization gas or gas molecules, to cool the emitter tip, the freezer comprising:

• a cooling stage that is contained in a cooling pot, provided in the ion source chamber and is thermally connected to the emitter tip, so as to have no direct physical contact therebetween, and cools the cooling pot using a heat conducting medium;
• and
• a spacer that maintains a given interval or greater between a peripheral surface of the cooling stage and an internal peripheral surface of the cooling pot.

A mounting method of a cooling mechanism that is used in an ion beam device, which includes an emitter tip to generate an ion in an ion source chamber defined by an ion source housing and supplied with an ionization gas or gas molecules, to cool the emitter tip, the method comprising:

• containing a cooling stage to cool a cooling pot in the cooling pot which is provided in the ion source chamber so as to be thermally connected to the emitter tip maintaining a spacer in a normal temperature state, the spacer configured using a material whose volume shrinks in a cooling state with respect to the normal temperature state;
• and
• causing the spacer to be in the cooling state in a state of being contained in the cooling pot so as to separate a peripheral surface of the spacer and an internal peripheral surface of the cooling pot.