Charged Particle Beam Device

A charged particle beam device comprising:

• a scanning deflector that performs scanning with a charged particle beam discharged from a charged particle source;
• a detector that detects a charged particle obtained based on the scanning with the charged particle beam;
• and
• a control device that adjusts an irradiation condition of the charged particle beam in at least two ways,
• wherein the control device measures or inspects a pattern formed on the sample, based on a signal obtained by scanning a first region on the sample with a first charged particle, and
• wherein the control device scans a second region including the first region with a second charged particle beam whose dose amount is smaller than that of the first charged particle beam, and specifies the first region, based on a signal obtained by scanning with the second charged particle beam.

A charged particle beam device comprising:

• a scanning deflector that performs scanning with a charged particle beam discharged from a charged particle source;
• a detector that detects a charged particle obtained based on the scanning with the charged particle beam;
• and
• a control device that adjusts an irradiation condition of the charged particle beam in at least two ways,
• wherein the control device measures or inspects a pattern formed on a sample, based on a signal obtained by scanning a first region on the sample with a first charged particle beam, and wherein the control device scans a second region including the first region with a second charged particle beam whose dose amount is smaller than that of the first charged particle beam, and selects a scanning direction of the first charged particle beam, based on a signal obtained by scanning with the second charged particle beam.