Charged particle beam apparatus, electron microscope and sample observation method

A charged particle beam apparatus having

• a sample holder that supports a sample,
• a first optical system that irradiates the sample on the sample holder with a charged particle beam,
• an electron detection unit that detects a secondary electron discharged from the sample due to irradiation using the charged particle beam or a transmission electron transmitting through the sample,
• a first vacuum chamber that holds the sample holder, the first optical system, and the electron detection unit in a vacuum atmosphere,
• a display unit that displays a microscopic image of the sample, based on an output of the electron detection unit, and
• a control unit that controls each operation of the sample holder and the first optical system, the charged particle beam apparatus comprising:
• a second vacuum chamber that is different from the first vacuum chamber;
• and
• a second optical system that is disposed in the second vacuum chamber, and that is different from the first optical system,
• a state changing means that is disposed in the second vacuum chamber, and that changes a state of the sample on the sample holder,
• wherein the second optical system and the control unit are connected to each other so as to be capable of mutual communication, and
• wherein the control unit can set the visual field position of the first optical system based on the image data after the state change of the sample transmitted from the second optical system.