Charged particle detector
AssigneeRaintree Scientific Instruments (Shanghai) Corporation
InventorsHu Luo, Xu Zhang
Life of this patent
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Abstract
A charged particle detector with high detection efficiency is presented in this patent. This charged particle detector contains a grid electrode used for attracting charged particles, a convertor with the shape of particle entrance area smaller than the particle exit area, which is used for converging charged particles and converting ions into electrons in the ion detection mode, an electron detection unit used for detecting secondary electrons and amplifying the signal detected, and a metal shielding. This optimized detector has a simple construction, is easy to assemble and has a low manufacturing cost.
Claims14
A charged particle detector to detect electrons and ions, comprising:
- a grid electrode to attract ions or electrons by applying switchable potential relative to a sample;
- an ion-to-electron convertor to convert ion into electron in the ion detection mode with a shape of which the particle entrance opening area is smaller than the particle exit opening area;
- an electron detection unit to detect the secondary electrons emitted from sample directly or electrons produced in the ion-to-electron convertor;
- and
- a metal shielding.
Dependencies are inferred from the claim text.