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US 2017/0323760 A1Published application
Multicolumn charged particle beam exposure apparatus
AssigneeAdvantest Corporation
InventorsMasaki Kurokawa, Takamasa Sato, Shinichi Kojima, Akio Yamada
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Abstract
A multicolumn charged particle beam exposure apparatus includes a plurality of column cells which generate charged particle beams, and the column cell includes a yoke which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil which is wound around the yoke. The coil includes a plurality of divided windings, which are driven by different power sources.
Claims12
A multicolumn device comprising:
- a plurality of column cells configured to generate charged particle beams;
- electromagnetic elements provided in the respective column cells;
- coils provided in the respective column cells and each including a plurality of divided windings configured to excite the corresponding electromagnetic element;
- and
- wiring connecting different current source circuits to the respective divided windings belonging to one of the coils.
2 more elements
A multicolumn charged particle beam exposure apparatus comprising:
- a plurality of column cells configured to generate charged particle beams;
- electromagnetic elements provided in the respective column cells;
- coils provided in the respective column cells and each including a plurality of divided windings configured to excite the corresponding electromagnetic element;
- and
- wiring connecting different current source circuits to the respective divided windings belonging to one of the coils;
- a stage unit on which a sample is to be placed;
- a column controller configured to control an operation of the multicolumn device;
- and
- a stage controller configured to control an operation of the stage unit.
6 more elements
Dependencies are inferred from the claim text.