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US 2017/0323756 A1Published application
Phosphorus doped diamond electrode with tunable low work function for emitter and collector applications
AssigneeArizona Board of Regents on behalf of Arizona State University
InventorsFranz A.M. Koeck, Robert J. Nemanich
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Abstract
An apparatus includes an emitter electrode including a phosphorus doped diamond layer with low work function. The apparatus further includes a collector electrode and a vacuum gap disposed between the emitter and the collector. The collector has a work function of 0.84 eV or less.
Claims20
An apparatus comprising:
- a thermionic electron emitter;
- a collector electrode comprising a phosphorus doped diamond layer;
- and
- a vacuum gap disposed between the emitter and the collector,
- wherein the collector has a work function of 0.84 eV or less.
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A method for forming an electrode, comprising:
- loading a substrate into a plasma enhanced chemical vapor deposition (PECVD) reactor and preparing a surface of the substrate for doped diamond growth;
- exposing the substrate to a pure hydrogen plasma for a preset duration;
- and
- depositing a phosphorus doped diamond layer on the substrate.
1 more element
Dependencies are inferred from the claim text.