183NM Laser And Inspection System

An inspection system comprising:

• a laser assembly configured to generate laser output light having an output wavelength in the range of approximately 180 nm and approximately 185 nm;
• first optics configured to direct the laser output light from the laser assembly to an object being inspected;
• second optics configured to collect an image portion of said laser output light affected by the object being inspected, and to direct the image portion to one or more sensors,
• wherein the laser assembly comprises:
• a fundamental laser configured to generate fundamental light having a fundamental frequency;
• an optical parametric system (OPS) coupled to the fundamental laser such that said OPS receives a first portion of the fundamental light, and said OPS is configured to generate a down-converted signal having a down-converted frequency that is less than the fundamental frequency;
• a fifth harmonic generator coupled to the fundamental laser such that the fifth harmonic generator receives a second portion of the fundamental light, and said fifth harmonic generator is configured to generate fifth harmonic light having a fifth harmonic frequency equal to five times the fundamental frequency;
• and
• a frequency mixing module that is optically coupled to receive the down-converted signal from the OPS and the fifth harmonic light from the fifth harmonic generator, and configured to generate said laser output light by mixing said down-converted signal and said fifth harmonic light,
• wherein the OPS comprises:
• a down-converted seed signal generator configured to generate a down-converted seed signal having said down-converted frequency and a first power level;
• and
• an optical parametric amplifier (OPA) configured to mix said down-converted seed signal with a portion of said fundamental light such that said mixing generates said down-converted signal at a second power level that is greater than ten times said first power level, and
• wherein the OPS is configured such that a sum of said down-converted frequency and said fifth harmonic frequency produces said laser output light in the range of approximately 180 nm and approximately 185 nm.

A method of generating light of between approximately 180 nm and 185 nm in wavelength, the method comprising:

• generating fundamental light at a fundamental frequency having a corresponding fundamental wavelength of approximately 1064.4 nm;
• down-converting a first portion of said fundamental light such that said down-converting generates a down-converted signal at a down-converted frequency having a corresponding down-converted wavelength of between approximately 1250 nm and approximately 1420 nm;
• converting a second portion of the fundamental light such that said converting generates fifth harmonic light at a fifth harmonic frequency of said fundamental frequency;
• and
• mixing the fifth harmonic light and the down-converted signal such that said mixing generates output laser light having an output wavelength corresponding to a sum of said down-converted frequency and said fifth harmonic frequency,
• wherein down-converting said first portion of said fundamental light includes:
• generating a down-converted seed signal having said down-converted frequency and a first power level;
• and
• mixing said down-converted seed signal with said first portion of said fundamental light such that said mixing said down-converted seed signal generates said down-converted signal at a second power level that is greater than ten times said first power level, and
• wherein said mixing the fifth harmonic light and the down-converted signal comprises passing said fifth harmonic light and said down-converted signal through at least one of an annealed CBLO crystal, a deuterium-treated CLBO crystal and a hydrogen-treated CLBO crystal.

A method of generating light of between approximately 180 nm and 185 nm in wavelength, the method comprising:

• generating fundamental light at a fundamental frequency having a corresponding fundamental wavelength of approximately 1030 nm;
• down-converting a first portion of said fundamental light such that said down-converting generates a down-converted signal at a down-converted frequency having a corresponding down-converted wavelength of between approximately 1400 nm and 1830 nm;
• converting a second portion of the fundamental light such that said converting generates fifth harmonic light at a fifth harmonic frequency of said fundamental frequency;
• and
• mixing the fifth harmonic light and the down-converted signal such that said mixing generates output laser light having an output wavelength corresponding to a sum of said down-converted frequency and said fifth harmonic frequency,
• wherein down-converting said first portion of said fundamental light includes:
• generating a down-converted seed signal having said down-converted frequency and a first peak power level;
• and
• mixing said down-converted seed signal with said first portion of said fundamental light such that said mixing said down-converted seed signal generates said down-converted signal at a second peak power level that is greater than ten times said first power level, and
• wherein said mixing the fifth harmonic light and the down-converted signal comprises passing said fifth harmonic light and said down-converted signal through at least one of an annealed CBLO crystal, a deuterium-treated CLBO crystal and a hydrogen-treated CLBO crystal.

A method of inspecting a sample, the method comprising:

• generating pulsed laser light at a fundamental frequency having a corresponding fundamental wavelength of approximately 1030 nm;
• down-converting a first portion of said fundamental light such that said down-converting generates a down-converted signal at a down-converted frequency having a corresponding down-converted wavelength of between approximately 1400 nm and 1830 nm;
• converting a second portion of the fundamental light such that said converting generates fifth harmonic light at a fifth harmonic frequency of said fundamental frequency;
• mixing the fifth harmonic light and the down-converted signal such that said mixing generates output laser light having an output wavelength corresponding to a sum of said down-converted frequency and said fifth harmonic frequency;
• directing the output laser light onto an object being inspected;
• and
• collecting an image portion of said laser output light affected by the object being inspected, and directing the image portion to one or more sensors,
• wherein down-converting said first portion of said fundamental light includes:
• generating a down-converted seed signal having said down-converted frequency and a first power level;
• and
• mixing said down-converted seed signal with said first portion of said fundamental light such that said mixing said down-converted seed signal generates said down-converted signal at a second power level that is greater than ten times said first power level, and
• wherein said mixing the fifth harmonic light and the down-converted signal comprises passing said fifth harmonic light and said down-converted signal through at least one of an annealed CBLO crystal, a deuterium-treated CLBO crystal and a hydrogen-treated CLBO crystal.