System, method and computer program product for detecting defects in a fabricated target component using consistent modulation for the target and reference components
AssigneeKLA-Tencor Corporation
InventorsAllen Park, Martin Plihal
Life of this patent
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Abstract
A fabricated device having consistent modulation between target and reference components is provided. The fabricated device includes a target component having a first modulation. The fabricated device further includes at least two reference components for the target component including a first reference component and a second reference component, where the first reference component and the second reference component each have the first modulation. Further, a system, method, and computer program product are provided for detecting defects in a fabricated target component using consistent modulation for the target and reference components.
Claims21
A fabricated device, comprising:
- a target component having a first modulation;
- and
- at least two reference components for the target component including a first reference component and a second reference component, the first reference component and the second reference component each having the first modulation.
A method, comprising:
- receiving a first image of a target component of a fabricated device, the target component having a first modulation;
- receiving a second image of a first reference component of the fabricated device for the target component, the first reference component having the first modulation;
- receiving a third image of a second reference component of the fabricated device for the target component, the second reference component having the first modulation;
- performing a first comparison of the first image and the second image to generate a first result indicating differences between the first image and the second image;
- performing a second comparison of the first image and the third image to generate a second result indicating differences between the first image and the third image;
- performing a third comparison between the first result and the second result to detect defects in the target component.
A computer program product embodied on a non-transitory computer readable medium, the computer program product including code adapted to be executed by a processor to perform a method comprising:
- receiving a first image of a target component of a fabricated device, the target component having a first modulation;
- receiving a second image of a first reference component of the fabricated device for the target component, the first reference component having the first modulation;
- receiving a third image of a second reference component of the fabricated device for the target component, the second reference component having the first modulation;
- performing a first comparison of the first image and the second image to generate a first result indicating differences between the first image and the second image;
- performing a second comparison of the first image and the third image to generate a second result indicating differences between the first image and the third image;
- performing a third comparison between the first result and the second result to detect defects in the target component.
An inspection system, comprising:
- a collector for:
- collecting a first image of a target component of a fabricated device, the target component having a first modulation,
- collecting a second image of a first reference component of the fabricated device for the target component, the first reference component having the first modulation, and
- collecting a third image of a second reference component of the fabricated device for the target component, the second reference component having the first modulation;
- and
- a processor for:
- performing a first comparison of the first image and the second image to generate a first result indicating differences between the first image and the second image,
- performing a second comparison of the first image and the third image to generate a second result indicating differences between the first image and the third image, and
- performing a third comparison between the first result and the second result to detect defects in the target component.
Dependencies are inferred from the claim text.