Processing Apparatus

Abstract

A processing apparatus includes a processing unit for processing the workpiece, a processing quality prediction unit connected with the processing unit electrically, a signal interpretation unit connected with the processing quality prediction unit electrically, and a control unit connected with both the processing unit and the signal interpretation unit electrically, wherein when the processing unit is processing the workpiece, the processing quality prediction unit detects the processing signal and sends the signal to the signal interpretation unit, wherein when the signal interpretation unit interprets the processing signal, if there is abnormality in the processing signal, the signal interpretation unit will immediately notify the control unit to stop the processing unit from operating. Therefore, by real-time monitoring the abnormality of the processing signal and stopping suspicious operation during processing, it allows operating personnel to deal with the abnormal condition, so as to greatly reduce the defect rate of the workpiece processing.

Dependencies are inferred from the claim text.