Radiation Source and Lithographic Apparatus

A radiation source comprising:

• a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation;
• and
• a radiation source housing apparatus comprising
• a rotatably mounted housing,
• an actuator arranged to drive the housing to rotate,
• a heater located adjacent to a first portion of the housing, and
• a cooler located adjacent to a second different portion of the housing.

A method of generating EUV radiation comprising:

• delivering fuel to a location from which the fuel emits EUV radiation;
• driving a radiation source housing to rotate;
• heating a portion of the housing to a temperature which is above the melting temperature of the fuel;
• and
• cooling a portion of the housing to a temperature which is below the melting temperature of the fuel.

A fuel collector for an EUV radiation source, the fuel collector comprising:

• a receptacle, said receptacle being provided with an entrance and a storage portion;
• an object which is disposed within the receptacle such that fuel passing through the entrance is incident upon a surface of the object;
• and
• a fuel transferring mechanism configured to transfer fuel collected upon the surface to the storage portion.