Piezoelectric micromachined ultrasonic transducer (pmut)
AssigneeInvenSense, Inc.
InventorsEldwin NG, Julius Ming-Lin TSAI, Nikhil APTE
Life of this patent
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Abstract
A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. An interior support structure is disposed within the cavity and connected to the substrate and the membrane.
Claims32
A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device comprising:
- a substrate;
- an edge support structure connected to the substrate;
- a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:
- a piezoelectric layer;
- and
- first and second electrodes coupled to opposing sides of the piezoelectric layer;
- and
- an interior support structure disposed within the cavity and connected to the substrate and the membrane.
A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) array comprising:
- a plurality of PMUT devices, wherein at least one PMUT device of the plurality of PMUT devices comprises:
- a substrate;
- an edge support structure connected to the substrate, wherein the edge support structure is connected to an electric potential;
- a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:
- a piezoelectric layer;
- first and second electrodes coupled to opposing sides of the piezoelectric layer;
- and
- a mechanical support layer connected to the first electrode;
- and
- an interior support structure disposed within the cavity and connected to the substrate and the membrane.
An image sensing system comprising:
- a plurality of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) devices, wherein at least one PMUT device of the plurality of PMUT devices comprises:
- a substrate;
- an edge support structure connected to the substrate;
- a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising:
- a piezoelectric layer;
- first and second electrodes coupled to opposing sides of the piezoelectric layer;
- and
- a mechanical support layer connected to the first electrode;
- and
- an interior support structure disposed within the cavity and connected to the substrate and the membrane;
- and
- control logic electrically coupled to the plurality of PMUT devices, the control logic for sensing an image.
Dependencies are inferred from the claim text.