Data display processing device, data display processing method and control program for scanning probe microscope

A data display processing device for a scanning probe microscope that, based on a plurality of measurement data sets that show respective distributions of predetermined physical quantities acquired using a scanning probe microscope, creates a plurality of images that show the distributions of the physical quantities and displays the images on a screen of a display unit, comprising:

• a) a group information storage unit for managing and storing a plurality of measurement data sets by group;
• b) specified data acquisition means for acquiring, from the group information storage unit, a specified data set which is a measurement data set specified by a user;
• c) display controlling means for displaying the specified data set acquired by the specified data acquisition means as an image on the screen;
• d) preliminary image generation means for, triggered by a determination of the specified data set, acquiring other measurement data set or sets belonging to a group in which the specified data set acquired by the specified data acquisition means is included from the group information storage unit, and generating a preliminary image or images which will be used when displaying the other measurement data set or sets on the screen;
• and
• e) first display switching means for switching to display the preliminary image generated by the preliminary image generation means within a predetermined region on the screen response to a first predetermined input operation by the user that is performed while the specified data set is displayed on the screen.