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US 2017/0322174 A1Published application
Pre-treated functionalized multi-walled carbon nanotube based methane sensor
AssigneeUchicago Argonne, LLC
InventorsRalu Divan, M. Tanim Humayun, Igor Paprotny, Lara A. Gundel
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Abstract
A method of manufacturing a functionalized pre-treated carbon nanotube. Atomic Layer deposition is utilized to functionalize a pre-treated carbon nanotube. The functionalized pre-treated carbon nanotube may be used in a chemiresistor, including for methane detection.
Claims20
A process for manufacturing a chemresistor comprising:
- fabricating electrodes on a substrate;
- depositing carbon nanotubes on the fabricated electrodes;
- pre-treating the carbon nanotubes to induce surface defects;
- and
- depositing a metal oxide functionalizing agent on the surface defects.
2 more elements
A chemiresistor comprising:
- a substrate having a plurality of electrodes;
- carbon nanotubes deposited on the electrodes, the carbon-nanotubes having a plurality of induced surface defects;
- and
- the carbon nanotubes having a functionalizing agent comprising a metal oxide, the functionalizing agent deposited on a portion of the plurality of induced surface defects.
1 more element
A method of sensing a gas comprising:
- placing a chemiresistor in proximity to a gas;
- interacting the gas with a metal oxide functionalized pre-treated carbon nanotube, altering the resistance of the metal oxide functionalized pre-treated carbon nanotube.
Dependencies are inferred from the claim text.