Method for Producing a Gas Sensor Device for Detecting at Least One Gaseous Analyte, and Gas Sensor Device for Detecting at Least One Gaseous Analyte

A method for producing a gas sensor device for detecting at least one gaseous analyte, the method comprising:

• providing a sensor main body comprising a semiconductor substrate, in which at least one cavity section is shaped, and a solid electrolyte layer arranged at a first main surface of the semiconductor substrate, wherein the solid electrolyte layer is left free of the semiconductor substrate in the at least one cavity section;
• producing a signal conductor layer deposited dry-chemically at a semiconductor substrate side of the sensor main body, such that, in the a region of the solid electrolyte layer not covered by the semiconductor substrate in the at least one cavity section at least one cutout section is shaped in the signal conductor layer, in which the signal conductor layer is cut out;
• and
• applying at least two measuring electrodes to the solid electrolyte layer by a wet-chemical process, wherein a first measuring electrode is arranged in the at least one cutout section of the signal conductor layer and a second measuring electrode is arranged on a solid electrolyte layer side of the sensor main body.