Preferably oriented nanotwinned au film, method of preparing the same, and bonding structure comprising the same
AssigneeNational Chiao Tung University
InventorsChih CHEN, Wei-Lan CHIU, Yi-Chia CHOU
Life of this patent
Estimating the term…
Abstract
The present invention is related to a preferably oriented nanotwinned Au film, a method of preparing the same, and a bonding structure comprising the same. The nanotwinned Au film has a thickness direction. The nanotwinned Au film is stacked along a [220] crystallographic axis orientation in the thickness direction. At least 50% by volume of the nanotwinned Au film is composed of a plurality of nanotwinned Au grains which are adjacent to each other, arranged in a direction perpendicular to the thickness direction, and stacked along a crystallographic axis orientation.
Claims8
A method for preparing a preferably oriented nanotwinned Au film, comprising:
- (A) providing a plating apparatus comprising an anode, a cathode, a direct current supply, and a plating solution, wherein the direct current supply is electrically connected to the anode and the cathode that are immersed in the plating solution;
- and
- (B) providing a direct current supply to provide a direct current for plating where a nanotwinned Au film forms on a surface of the cathode;
- wherein the preferably oriented nanotwinned Au film is stacked along a [220] crystallographic axis orientation in a thickness direction of the film;
- and at least 50% by volume of the nanotwinned Au film is composed of a plurality of nanotwinned Au grains which are adjacent to each other, arranged in a direction perpendicular to the thickness direction, and stacked along a [111] crystallographic axis orientation;
- and a plating solution comprises a gold ion, a chloride ion, and an acid.
Dependencies are inferred from the claim text.