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AssigneeApplied Materials, Inc.
InventorsStefan BANGERT, Uwe SCHÜßLER, Jose Manuel DIEGUEZ-CAMPO
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A material source arrangement for depositing a material on a substrate in a vacuum deposition chamber is described. The material source arrangement includes a distribution pipe being configured to be in fluid communication with a material source providing the material to the distribution pipe; and at least one nozzle configured for guiding the material provided in the distribution pipe to the vacuum deposition chamber. The nozzle includes a thread for repeatedly connecting and disconnecting the nozzle to the distribution pipe. Further, a deposition apparatus for depositing material on a substrate including a material source arrangement, a nozzle for a material source arrangement, and a method for providing a distribution pipe and a nozzle for a material source arrangement are described.
A material source arrangement for depositing a material on a substrate in a vacuum deposition chamber, comprising:
A deposition apparatus for depositing material on a substrate, comprising
A nozzle for depositing material on a substrate in a vacuum deposition chamber, wherein the nozzle is configured for guiding evaporated material in the vacuum deposition chamber, the nozzle comprising:
Method for providing a distribution pipe and a nozzle for a material source arrangement, the method comprising:
Dependencies are inferred from the claim text.