Nanocomposite and method of producing same
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorBernard VIALA
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Abstract
Microelectronics and the manufacture of microelectronic components for an integrated circuit operating at a high frequency are disclosed. Production of micro-inductors having a high induction density and high quality factor, in particular at a usage frequency greater than 1 GHz, or even greater than 5 GHz, is disclosed. A nanocomposite 1 including magnetic alloy nanoparticles 10 at least partially includes a soft magnetic alloy, an insulating matrix 20, and insulating nanoparticles 30, the nanoparticles being supported in the matrix and the soft magnetic alloy nanoparticles being encapsulated by insulating nanoparticles.
Claims17
A nanocomposite comprising:
- magnetic alloy nanoparticles at least partially comprised of a soft magnetic alloy and
- an insulating matrix supporting the magnetic alloy nanoparticles characterized in that it further comprising insulating nanoparticles,
- further comprising insulating nanoparticles supported by the insulating matrix and inserted between the magnetic alloy nanoparticles.
Dependencies are inferred from the claim text.