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US 2017/0320724 A1Published application
Mems grid for manipulating structural parameters of mems devices
AssigneeMEMS Drive, Inc.
InventorsRoman Gutierrez, Tony Tang, Xiaolei Liu, Guiqin Wang, Matthew NG
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Abstract
A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.
Claims11
A system for controlling the structural characteristics of a MEMS device, comprising:
- a MEMS device comprising one or more structures;
- and
- a MEMS grid disposed on the MEMS device, the MEMS grid including a plurality of holes etched into a surface of the MEMS device;
- wherein the MEMS grid is configurable to change the structural characteristics of the MEMS device.
1 more element
A method of fabricating a MEMS device with specific structural characteristics, comprising:
- identifying structural requirements for a MEMS device;
- determining a geometric pattern capable of providing the identified structural requirements;
- and
- etching a plurality of holes into the MEMS device based in accordance with the determined geometric pattern.
1 more element
Dependencies are inferred from the claim text.