Substrate processing tool
AssigneeMitsuboshi Diamond Industrial Co., Ltd.
InventorsYosuke HIRAGURI, Noriyuki OGASAWARA, Shinichi SATO
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Abstract
A substrate processing tool is prevented from falling out of a tool holder. This substrate processing tool is a tool for attachment to a substrate processing apparatus. The substrate processing tool includes a tool main body, a blade edge portion, and an engaging portion. A holding portion that is to be held by the chuck portion of the substrate processing apparatus is formed in at least a portion of the tool main body. The blade edge portion is formed on one end side of the tool main body. The engaging portion is formed on the other end side of the tool main body, and protrudes farther than the surface of the tool main body.
Claims6
A substrate processing tool for attachment to a substrate processing apparatus, the substrate processing tool comprising:
- a tool main body, a holding portion to be held by a chuck portion of the substrate processing apparatus being formed in at least a portion of the tool main body;
- a blade edge portion formed on one end side of the tool main body;
- and
- an engaging portion formed on another end side of the tool main body, the engaging portion protruding farther than a surface of the tool main body.
Dependencies are inferred from the claim text.