Slurry feed system and method of providing slurry to chemical mechanical planarization station
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTsung-Huang CHEN, Wei-Cheng LI, Chi-Tung LAI, Yung-Ti HUNG
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Abstract
Disclosed herein is a method of providing slurry to a chemical mechanical planarization (CMP) station. The method includes the operations of: mixing slurry, water and a chemical to form dilute slurry; measuring a surface tension of the dilute slurry; supplying the dilute slurry to a CMP station through piping; and modulating a flow rate of the dilute slurry in the piping in accordance with the measured surface tension.
Claims20
A method of providing slurry to a chemical mechanical planarization (CMP) station, comprising:
- mixing slurry, water and a chemical to form dilute slurry;
- measuring a surface tension of the dilute slurry;
- and
- supplying the dilute slurry to a CMP station.
A method of providing slurry to a chemical mechanical planarization (CMP) station, comprising:
- mixing slurry, water and a chemical to form dilute slurry;
- supplying the dilute slurry to a CMP station through piping;
- measuring a surface tension of the dilute slurry prior to or during the supplying the dilute slurry to the CMP station;
- and
- modulating a flow rate of the dilute slurry in the piping in accordance with the measured surface tension.
A method of providing slurry to a chemical mechanical planarization (CMP) station, comprising:
- mixing slurry, water and a chemical to form dilute slurry;
- measuring a surface tension of the dilute slurry;
- supplying the dilute slurry to a CMP station through piping;
- and
- modulating a flow rate of the dilute slurry in the piping, wherein the modulating the flow rate of the dilute slurry in the piping comprises:
- increasing the flow rate of the dilute slurry when the surface tension is less than a first value;
- and
- decreasing the flow rate of the dilute slurry when the measured surface tension is greater than a second value.
Dependencies are inferred from the claim text.