Ionizing particle beam fluence and position detector array using micromegas technology with multi-coordinate readout

A particle beam detector array, comprising:

• a sealed, gas-filled, ionizing radiation detector chamber;
• a substrate disposed within the ionizing radiation detector chamber, the substrate comprising a multi-layer array arrangement of sensors comprising three planar coordinates X, Y, and ST (stereo) situated on three layers of the substrate;
• a dielectric lattice structure, disposed over the substrate and the multi-layer array arrangement of sensors;
• and
• a conductive mesh structure disposed over the dielectric lattice structure.

A method of using an ionizing particle beam detector system, comprising:

• directing an ionizing particle beam from a particle beam generator to a particle beam fluence and position detector array, wherein the ionizing beam is directed in a direction substantially perpendicular to the position detector array;
• measuring the ionizing particle beam fluence and position with a particle beam fluence and position detector array;
• and
• calibrating the particle beam generator by adjusting particle beam generator to generate an ionizing particle beam comprising a fluence and position within one percent of a desired fluence and position.