Inverse electrowetting energy harvesting and scavenging methods, circuits and systems

An inverse electrowetting harvesting and scavenging circuit, comprising:

• a first substrate having a first surface and a second surface;
• an electrode formed proximate the first surface, the electrode including a first insulating layer covering a surface of the electrode;
• an electromechanical systems device including a moveable mass that extends over the first surface of the first substrate and may be displaced relative to the first substrate in three dimensions responsive to an external force applied to the moveable mass;
• a moveable electrode formed on the moveable mass;
• a conductive fluid positioned between the insulating layer covering the electrode and the movable electrode;
• and
• energy harvesting and scavenging circuitry electrically coupled to the moveable electrode and the electrode, the energy harvesting and scavenging circuitry configured to provide electrical energy responsive to electrical energy generated by the moveable electrode, the conductive fluid and the electrode through reverse electrowetting due to movement of the moveable electrode relative to the electrode and to the conductive fluid on top of the electrode.