Laser apparatus and extreme ultraviolet light generation system
AssigneeGigaphoton Inc.
InventorsYoshiaki KUROSAWA, Hideo HOSHINO
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AssigneeGigaphoton Inc.
InventorsYoshiaki KUROSAWA, Hideo HOSHINO
Estimating the term…
A laser apparatus may include a master oscillator, a plurality of amplifiers, a photodetector device configured to detect a light beam traveling back along a laser beam path, and a controller. The photodetector device may include a first photodetector configured to detect energy of a light beam traveling back along the laser beam path and a second photodetector configured to detect power of the light beam traveling back along the laser beam path. The controller may be configured to determine that a return beam is generated when the intensity of the energy detection signal exceeds a first threshold. The controller may be configured to determine that a self-oscillation beam is generated when the intensity of the power detection signal exceeds a second threshold.
A laser apparatus comprising:
A laser apparatus comprising:
Dependencies are inferred from the claim text.