Mechanical structure comprising an actuator and mechanical amplification means, and production method
AssigneesCommissariat A L'energie Atomique Et Aux Energies Alternatives, STMicroelectronics (Crolles 2) SAS, Universite Grenoble Alpes
InventorsFabrice CASSET, Skandar BASROUR, Cédrick CHAPPAZ, Jean-Sébastien DANEL
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Abstract
A mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at the active substrate, the stack comprises an elementary structure for amplifying the vibrations: positioned between the actuator and the active substrate, the structure designed to transmit and amplify the vibrations; and comprising at least one trench, located between the actuator and the active substrate. A method for manufacturing the structure comprising the use of a temporary substrate is provided.
Claims18
A mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at said active substrate, said stack comprising an elementary structure for amplifying said vibrations:
- positioned between said actuator and said active substrate, the structure being designed to transmit and amplify said vibrations;
- and
- comprising at least one trench, located between said actuator and said active substrate.
A method for manufacturing a mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at said active substrate, said stack comprising an elementary structure for amplifying said vibrations:
- positioned between said actuator and said active substrate, the structure being designed to transmit and amplify said vibrations;
- and
- comprising at least one trench, located between said actuator and said active substrate,
- comprising the following steps:
- producing at least one actuator on the surface of an elementary substrate;
- an operation of bonding said elementary substrate, on the actuator side, to a temporary substrate;
- producing at least one trench in said elementary substrate, in the face opposite that including said actuator, the elementary substrate and said trench forming an elementary amplification structure;
- an operation of bonding, on the trench side, said elementary substrate comprising at least said trench to the active substrate;
- an operation of removing the temporary substrate in order to free the actuator.
Dependencies are inferred from the claim text.