Apparatus for controlling temperature uniformity of a showerhead

A process chamber, comprising:

• a showerhead having a substrate facing surface and one or more plenums for providing one or more process gases through a plurality of gas distribution holes formed through the substrate facing surface of the showerhead;
• and
• a heat transfer system coupled to the showerhead, the heat transfer system comprising:
• a heat transfer plate having a first diameter and a plurality of independent flow paths disposed within the heat transfer plate, each flow path having a first inlet and a first outlet;
• a supply conduit system having a second inlet fluidly coupled to a plurality of second outlets, wherein each second outlet is fluidly coupled to a corresponding first inlet of the heat transfer plate;
• and
• a return conduit system having a third outlet fluidly coupled to a plurality of third inlets, wherein each third inlet is fluidly coupled to a corresponding first outlet of the heat transfer plate,
• wherein the supply conduit system and the return conduit system are each disposed within an imaginary cylindrical projection above the heat transfer plate.

A heat transfer system, comprising:

• a heat transfer plate having a first diameter and a plurality of independent flow paths disposed within the heat transfer plate, each flow path having a first inlet and a first outlet;
• a supply conduit system having a second inlet fluidly coupled to a plurality of second outlets, wherein each second outlet is fluidly coupled to a corresponding first inlet of the heat transfer plate;
• and
• a return conduit system having a third outlet fluidly coupled to a plurality of third inlets, wherein each third inlet is fluidly coupled to a corresponding first outlet of the heat transfer plate;
• a plurality of supply lines, each of which is fluidly coupled to one of the plurality of second outlets at a first end and to a corresponding first inlet at a second end opposite the first end;
• and
• a plurality of return lines, each of which is fluidly coupled to a corresponding first outlet at a third end and to one of the plurality of third inlets at a fourth end opposite the third end,
• wherein the supply conduit system and the return conduit system are each disposed within an imaginary cylindrical projection above the heat transfer plate.