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US 2017/0303403 A1Published application
Method and apparatus for curing thin films on low-temperature substrates at high speeds
AssigneeNcc Nano, LLC
InventorsKURT A SCHRODER, KARL M MARTIN, DOUG K. JACKSON, STEVEN C MCCOOL
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Abstract
A composite film is disclosed. The composite film includes a substrate, a thermal barrier layer located on top of the substrate, wherein the thermal barrier layer has a higher decomposition temperature than the substrate, and a thin film located on top of the thermal barrier layer, wherein the thin film is to be thermally processed by a pulsed light from a flashlamp.
Claims8
A composite film comprising:
- a substrate;
- a thermal barrier layer located on top of said substrate, wherein said thermal barrier layer has a higher decomposition temperature than said substrate;
- and
- a thin film located on top of said thermal barrier layer, wherein said thin film is to be thermally processed by pulsed light from a flash lamp.
1 more element
Dependencies are inferred from the claim text.