Apparatus and Method for Plasma Ignition with a Self-Resonating Device
AssigneeMKS Instruments, Inc.
InventorsShaun T. Smith, Steven R. Walther, Chen Wu
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Abstract
Methods and apparatus for igniting a process plasma within a plasma chamber are provided. One or more self-resonating devices are positioned within a plasma chamber relative to a plasma generation volume within the plasma chamber. The plasma generation volume is defined by the plasma chamber. Each of the self-resonating devices generates an ignition plasma. The ignition plasmas cause a partial ionization of an ignition gas. The partially ionized ignition gas allows for ignition of a process plasma by applying an electric field to the plasma generation volume.
Claims29
A method for igniting a process plasma, the method comprising:
- flowing an ignition gas into a plasma chamber;
- providing at least one self-resonating device disposed relative to the plasma chamber and a power transformer coupled to the plasma chamber;
- using the at least one self-resonating device to form at least one ignition plasma within the plasma chamber, the at least one ignition plasma causing at least partial ionization of the ignition gas;
- and
- using the power transformer to inductively couple power to the plasma chamber, including to the at least one ignition plasma in the plasma chamber, and ignite the process plasma within the plasma chamber,
- wherein the at least one self-resonating device enables the at least partial ionization of the ignition gas using reduced power during ignition of the process plasma.
A plasma source for generating a plasma, the plasma source comprising:
- a plasma ignition gas source that flows a plasma ignition gas into a plasma chamber;
- at least one self-resonating device disposed relative to the plasma chamber, the at least one self-resonating device generates at least one ignition plasma within the plasma chamber, the at least one ignition plasma causing at least partial ionization of the plasma ignition gas;
- a power source in direct electrical communication with the plasma chamber;
- and
- a power transformer coupled to the plasma chamber configured to ignite the process plasma within the plasma chamber by coupling power from the power source to the plasma chamber, including to the at least one ignition plasma in the plasma chamber,
- wherein the at least one self-resonating device enables the at least partial ionization of the plasma ignition gas using reduced power during ignition of the process plasma.
Dependencies are inferred from the claim text.