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US 2017/0303338 A1Published application
Optically heated substrate support assembly with removable optical fibers
AssigneeApplied Materials, Inc.
InventorVijay D. Parkhe
Life of this patent
Estimating the term…
Abstract
A substrate support includes a plate comprising a top surface and a bottom surface, wherein the top surface is to support a substrate. The plate further comprises an electrode, one or more resistive heating elements, a first plurality of channels, and a plurality of optical fibers in the first plurality of channels, wherein the plurality of optical fibers are removable from the substrate support.
Claims20
A substrate support, comprising:
- a plate comprising a top surface and a bottom surface, wherein the top surface is to support a substrate, the plate further comprising:
- an electrode;
- one or more resistive heating elements;
- a first plurality of channels;
- and
- a plurality of optical fibers in the first plurality of channels, wherein the plurality of optical fibers are removable from the substrate support.
3 more elements
A substrate support assembly, comprising:
- a ceramic plate comprising a top surface and a bottom surface, wherein the top surface is to support a substrate, the ceramic plate further comprising a first plurality of channels for receiving a plurality of optical fibers;
- and
- a ceramic shaft bonded to the bottom surface of the ceramic plate, the ceramic shaft comprising a cavity;
- and
- a fiber guide inserted into the cavity of the ceramic shaft, the fiber guide comprising a second plurality of channels, wherein a second channel of the second plurality of channels is to guide a first optical fiber of the plurality of optical fibers into a first channel of the first plurality of channels.
2 more elements
A method of refurbishing an electrostatic chuck comprising:
- identifying a faulty optical fiber in the electrostatic chuck comprising a plurality of removable optical fibers, wherein each of the plurality of removable optical fibers is inside of one of a first plurality of channels in the electrostatic chuck;
- removing the faulty optical fiber from a first channel of the first plurality of channels in the electrostatic chuck, wherein the first channel is substantially parallel to a top surface of the electrostatic chuck;
- and
- inserting a new optical fiber into the first channel in the electrostatic chuck.
1 more element
Dependencies are inferred from the claim text.