Methods for in situ monitoring and control of defect formation or healing

A method for monitoring defect formation or healing, comprising:

• exposing a surface of a material to incident radiation;
• detecting movement of an analyte through defects in the material;
• and
• generating data indicative of defect formation or healing, wherein the method is performed in situ and the data indicative of defect formation or healing provide a rate of defect formation or healing, a temporal change in the rate of defect formation or healing, a temporal change in the size of the defects, a spatial change in the rate of defect formation or healing, a spatial change in the size of the defects, a maximum size of the defects, or combinations thereof.

A method for monitoring defect formation or healing, comprising:

• exposing a surface of a material to incident radiation;
• applying an electrical bias to the material;
• measuring electrical conductivity through a conductive probe in electrical contact with the material;
• and
• generating data indicative of defect formation or healing, wherein the method is performed in situ and the data indicative of defect formation or healing provide a rate of defect formation or healing, a temporal change in the rate of defect formation or healing, a temporal change in the size of the defects, a spatial change in the rate of defect formation or healing, a spatial change in the size of the defects, or combinations thereof.

A method for monitoring defect formation or healing, comprising:

• exposing a surface of a material to incident radiation;
• heating the material;
• subsequently measuring temperature of the surface of the material;
• and
• generating data indicative of defect formation or healing, wherein the method is performed in situ and the data indicative of defect formation or healing provide a rate of defect formation or healing, a temporal change in the rate of defect formation or healing, a temporal change in the size of the defects, a spatial change in the rate of defect formation or healing, a spatial change in the size of the defects, or combinations thereof.